1950 X 1800X 2000mm
5PPM
≥99%
≤2%
土0.05mm
≤1.5H
2800X 2000 X 2200mm
≤5.0*108Pam3/s
1350X 1100 X 1800mm
≤1%
≤0.5H
1000 X 1000X 1800mm
6PPM